Analytical Electron Microscopy of Silicon Nitride Nanostructures Synthesized from the Vapour Phase [Microscopía electrónica analítica de nanoestructuras de nitruro de silicio sintetizadas a partir de la fase de vapor]

Mariella Cortez Caillahua, Francisco Moura, Guillermo Solorzano, N.R. Checca


In the present study, the size, morphology and composition of the silicon nitride powder (Si3N4) were studied by analytical electron microscopy techniques. Samples synthesized at 300 °C by precipitation from the vapor phase reaction of SiCl4 and NH3 were analyzed using Field Emission Scanning Electron Microscopy (SEM) acquiring images with secondary electrons (SE) and back-scattered electrons (BSE). Their crystalline phases obtained by heat treatment in an argon stream at 1500 ºC were analyzed using Transmission Electron Microscopy (TEM) combining electron diffraction and energy dispersive X-ray spectroscopy (EDS). The results show different morphologies and a wide size distribution of the silicon nitride powder depending on the content of N, O and Si. The high degree of agglomeration shows particles in the micrometer range, however, the individual size of the particles is in the nanometer-scale.


Si3N4; Vapour phase reaction; Nanostructures

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